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Oxford Vacuum Science Limited
Bench-Top High Vacuum and Thin Film Products

Bench-top high vacuum &
thin film deposition products

Oxford Vacuum Science offers a range high vacuum products for research & development and light industrial applications.

Oxford Vacuum Science's product range includes:


NanoSphere

NanoSphere is a highly flexible bench-top high vacuum platform for research
& development and light industrial applications. Features and typical performance encompass:

 

  • All stainless steel "bell-jar" type vacuum chamber
    > low 10-7mbar range ultimate pressure
  • 16m3/hr roughing pump for rapid evacuation
    >atmosphere to 1x10-5mbar in 5 minutes
  • 240l/s wide-range turbo-pump for high vacuum
    > low 10-6mbar range in less than 1 hour

NanoSphere offers a safe power-off / shut-down mode for storing the chamber in clean, dry conditions, at a pressure of a few mbar and therefore protecting the turbo-pump bearing lubricant, whilst venting the backing pump to prevent rotary pump oil migration

 

VapourPhase Omega

VapourPhase Omega is a new advanced mounting system for thermal evaporation, providing a real, low-cost alternative to electron beam technology, and featuring:

 

  • a high current, in-vacuo switch, for multi-layer deposition of up to four materials
  • Power Rail source clamp mounting system
    individual source baffling
  • water cooling for thermal stability
  • rapid release source clamps
  • on-board 800A high current power supply
  • current / voltage control and RS232 interface

Oxford Vacuum Science develops innovative vacuum coating technologies to provide you with market leading performance in a compact, low cost format.

NanoTech Scientific, Inc.
2 Robertson Road
Worcester MA 01602
www.nanotechscientific.com
support@nanotechscientific.com
phone: (508) 215-6793
fax: (508) 791-4674