XYZ Manipulation:

Devices that precisely move samples in three orthogonal axis are called XYZ manipulators. Additional rotational movements around these Axis are achieved using add-on rotary devices. While there are six degrees of freedom (XYZ and 3 rotations) for these motions.

Manipulation Axis:

When viewing a manipulator with its bellows in front and the support structure behind, the Y axis lies along the line joining the center of the bellows and the center of the support, the X axis goes from left to right, and Z axis coincide with the bellow axis.

Further Product Information:

XY-Stages	XYZ-Manipulators	Z-Motion Devices

Rotation Axis:

Rotating Axis names are listed in table below.

To convenience naming Axis they are called further only R1, R2 and R3.

In some designs of manipulator the R1 motion is continuous but more often totally rotation is only 360 (180). R2 rotation in our constructions has continuous rotation 360 through any angle. Other rotation R3 is typically only a fraction of a complete circle. When considering rotation the designer must ensure that there is a sufficient clearance usually only around R1 axis so the swept radius doesn't collide with parts in chamber during a 360 traverse. XYZ Manipulators are available in a wide range of characteristics including single bellow (for all three axis) or double bellows (one for Z axis travel, the other for XY travel) and regular or wide through-bores. In addition to three axis devices manipulators with Z axis only or XY axis only stages are available.

Further Product Information:

4-Axis Manipulators	5-Axis Manipulators	5-Axis Manipulators with Motorization

Heating and Cooling:

Samples are heated by bombarding the sample with an e-beam or the resistive heater wire mounted in a sample holder. They are cooled by using a manipulator mounted cryostat through which liquid nitrogen (LN2) flows.

Manipulators with Helium Cryostat	Manipulators with Sample Heating	Sample Heating Power Supplies

Motorization:

To achieve the highest positioning accuracy, resolution and repeatability the XYZ manipulator and rotary drive movements are motorized with stepper motors. Motorization is also used for very long Z axis travel manipulators where manual travel would be arduous or inaccessible.

Further Product Information:

Stepper Motor Shifts for XY Stages	Stepper Motor Shift for Z	Motorized Secondary Rotation Modules

Rotary Motion:

Rotary Feedthroughs - Flex metal bellows to transfer motion from an air side rotating shaft to a bent vacuum side shaft. The bellows doesn't rotate, it "wobbles" around in a circular path at one end while remaining stationary at the other. This type of feedthrough is satisfactory for UHV pressures, but bellows fatigue limits the life. Rotary devices sealed this way are best used in non continuous applications such as UHV sample rotation. Any mounting orientation is permitted.

Further Product Information:

Rotary Feedthroughs	Differentially Pumped Rotary Feedthrough	Vacuum Goniometers

Linear Motion:

Linear Shifts - A shift of a pair of flanges connected by bellows in which the free one moves towards the fixed one in a controlled, precise motion while keeping the flange faces parallel. Its action is similar to the Z Slide manipulator but its positioning, precision and travel length are lower. They are actuated by handwheels.

Linear Feedthroughs - These devices are bellows sealed rods that move along the rod's axis. The movement mechanism is a screw mechanism (self blocking) with manual actuation. They are used for application needing straight line, fixed distance movement.

Further Product Information:

Linear Motion Device(with Tilt)	Linear Feedthroughs	Z Chain Slide

Transfer Devices:

Wobble sticks - allow the transmission of relatively simple hand movement through the vacuum wall. The flexible bellows provide a cone of movement and some linear movement for the end of probe. The wobble stick's vacuum end often with push rod actuated pincers is used to transfer the sample holders.

Vacuum Manipulator - Equipment is designed to be modular for convenience and give total flexibility. The individual modules such as the Z Slide, XY Stage, rotary feedthrougs and motorization modules are compatible to allow complex application to be built up from a range of simple units. Multi Axes Manipulator Information List is to guide you through the configuration process and to help you choose the modules that, when combined, result in the manipulator best suited to your individual application.

Further Product Information:

Wobble Stick with Rotating Tip	Wobble Stick with Parallel Mobile Tip	Wobble Stick with Gripping and Rotating Tip

MULTI AXES MANIPULATOR INFORMATION LIST:

The most common XYZ manipulators application is to move samples (mounted in sample holders) to precise positions in a UHV environment - the movement being controlled from the air-side of the chamber. As their collective name suggests, their movement axis are (in less technical terms): front-to-back; up-and-down, and side-to-side. Often XYZ manipulators are combined with various rotary drive devices which allow motion in the R1 (primary or polar or theta) rotation, R2 (azimuthal or phi or alpha) rotation, and R3 (tilt or flip or beta) rotation. When selecting a sample manipulator, the following criteria should be addressed and determined in light of the specific application.

NanoTech Scientific, Inc.
2 Robertson Road
Worcester MA 01602
www.nanotechscientific.com
support@nanotechscientific.com
phone: (508) 215-6793
fax: (508) 791-4674