SpinTron 3

The SpinTron3 is a circular magnetron sputtering gun with a 3-inch diameter. It can accommodate a wide range of sputtering targets, metallic or insulating, magnetic or non-magnetic. The internal magnetic configuration utilizing a circular rare-earth NdFeB permanent magnetenables excellent film uniformity and target utilization. SpinTron3 is easy to install, to operate, and to maintain. The quality construction provides long-term operation. The shock-absorbing packaging design allows secure shipping and storage.

Features: -

• Quality construction: The SpinTron series of sputtering guns was designed and manufactured with a focus on details. We use high quality materials of stainless steel and ceramics. The design and selection of components and materials are based on the principles of physics and engineering.
• Enhancement from magnetic assembly: We have used electromagnetic finite element calculations in the design of the permanent magnetic assembly to achieve high field strength and uniform field profile. We use NdFeB rare-earth permanent magnet in every SpinTron product, and offer a true magnetron sputtering tool. The magnet is coated with multiple layers of protective materials against cooling-water induced corrosion for durability.
• Strong coupling with external power: The SpinTron is equipped with a standard electrical RF connector, which matches physically and electronically with a wide range of DC and RF sputtering power supplies. The low impedance sputtering heads are easily interfacible with external power supplies.
• Easy installation and adjustment: The SpinTron can be installed very easily with a standard fitting without the use of special tools. Its position in the vacuum chamber can be adjusted conveniently.
• Easy target change: Change of target is as easy as "123" by firstly placing the target on the anode, then putting on the target cover, and finally, adding on the anode shield. There is no need to adjust the gun to fit targets with different height.
• Versatile sizes: The SpinTron Series consists of 1, 2, 3, 4-inch diameter sputtering heads. Other diameters can be custom made with similar performance as the standard offerings.
• Easy maintenance: The SpinTron is easy to maintain and designed to have a long life time.
• Customer centered services: We warrantee our products against defective parts and poor workmanship. We strive to minimize down-time for the products. We are so confident about the SpinTron that we will provide a loaner for a SpinTron under repair, so that disruption to your business is minimized.

Applications: -

The SpinTron magnetron guns can be used to fabricate a wide range of films. Some of the applications are listed below,

Film coating
Semiconductor devices
Spintronic devices
Magnetic recording media
Superconducting films
Quantum computing devices
MEMS
Biosensors
Nanotechnology
Superlattices
Granular films
Shape memory alloys
Combinatorial thin film deposition
Thin film based lasers

Technical Specification

Sputtering Target
Diameter 3.0" (76.2mm)
Thickness to 1/4" for non-magnetic target
to 1/16" for magnetic target
Utilization up to 30%
Magnet NdFeB Rare Earth Magnet

Power
DC (Max.) 1200 W
RF (Max.) 800 W
Sputtering Current (Max.) 3 Amp
Sputtering Voltage 100-1000 V
Sputtering Pressure .5-100 mTorr

Cooling Water
Flow Rate 1 GPM
Water Inlet Temperature <20 C
Water tubing 0.25" O.D.
Mounting
Feedthrough 1" O.D.tube
Electrical Connector Standard HN type (DC and RF)

Dimension and Weight
Anode Shield Diameter 4.75"
Total Length 15''
Weight 12 lbs

NanoTech Scientific, Inc.
2 Robertson Road
Worcester MA 01602
www.nanotechscientific.com
support@nanotechscientific.com
phone: (508) 215-6793
fax: (508) 791-4674